Abstract
PbZr0.53Ti0.47O3 (PZT) ferroelectric thin films were deposited on LaNiO3 (LNO) buffered stainless steel (SS) substrates by sol-gel method. The effect of LNO buffer layer on the orientation and electric properties of PZT thin films for different thicknesses were studied. X-ray diffraction (XRD) results indicated that PZT thin films on SS substrates exhibit the (100) preferred orientation with the LNO buffer layers. Scanning electron microscope (SEM) images show that PZT thin films were well crystallized with grain size of about 100 nm. PZT thin films deposited on SS maintain the excellent ferroelectric properties with remnant polarization of about 20 μC/cm2.
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B. Willeng, M. Kohli, K. Brooks, P. Muralt and N. Setter, J.Ferroelectrics 201, 147 (1997).
D. J. You, W. W. Jung, S. K. Choi, and Yasuo Cho, Appl. Phys. Lett. 84, 3346 (2004).
Z. L. Hea, Y. G. Wang and K. Bia, Solid State Communications 150, 1837–1839 (2010).
T. Fujii, Y. Hishinuma, T. H. Mita and T. Naono, Sensors and Actuators 163 , 220–225(2010).
Y. K. Wang, T. Y. Tseng and P. Lin, Appl. Phys. Lett.80, 3790–3792 (2002).
T. Morimoto, O. Hidaka, K. Yamakawa, O. Arisumi, H. Kanaya, T. Iwamoto, Y. Kumura, I. Kunishima and S. Tanaka, J. Appl. Phys. 39, 2110–2113 (2000).
J. Lee, L. Johnson, A. Safari, R. Ramesh, T. Sands, H. Gilchrist and V. G. Keramidas, J. Appl. Phys. Lett.63, 27–29 (1993).
T. Nakamura, Y. Nakao, A. Kamisawa and H. Yakasu, J. Appl. Phys. 33, 5207–5210(1994).
S.D. Bernstein, T.Y. Wong, Y. Kisler and R. W. Tustison, J. Mater. Res. 8, 12–13(1993).
B. G. Chae, Y. S. Yang, S. H. Lee, M. S. Jang, S. J. Lee, S. H. Kim, W. S. Beak and S. C. Kwon, Thin Solid Films 410, 107–113 (2002).
R. Ramesh, H. Gilchrist, T. Sands, V. G. Keramidas, R. Haakenaasen and D. K. Fork, J. Appl. Phys. Lett. 63,3592–3594(1993).
J. R. Cheng, W.Y. Zhu, N. Li and L. E. Cross. J. Appl. Phys. Lett. 81, 25(2002).
M. D. Nguyen, H. Nazeer, K. Karakaya, S. V. Pham, R. Steenwelle, M. Dekkers, L. Abelmann, D. H. A. Blank and G .Rijnders, J. Micromech. Microeng. 20, 085022 (2010).
K. Nishida, M. Osada, S. Yokoyama and T. Kamo, Key Engineering Materials 135–138, 421–422 (2010).
Y. R. Lin, C. Andrews and H. A. Sodano, Proc. SPIE, 7644, 76440C (2010).
G. W. Pabst, L. W. Martin, Y. H. Chu and R. Ramesh, J. Appl. Phys. Lett. 90, 072902 (2007).
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Zhao, X., Yu, X., Yu, S. et al. Characterization of Textured PZT Thin Films Prepared by Sol-gel Method onto Stainless Steel Substrates. MRS Online Proceedings Library 1299, 920 (2011). https://doi.org/10.1557/opl.2011.165
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DOI: https://doi.org/10.1557/opl.2011.165