Abstract
The electrical and luminescent properties of Mg-doped GaN films grown by molecular beam epitaxy (MBE) using ammonia as the nitrogen source have been investigated. Due to their different growth environments, the Mg-doped GaN films grown by MBE using ammonia exhibited properties that were different from similar films grown by metal-organic chemical vapor deposition (MOCVD). It has been found that the introduction of positive charges during growth is important in the achievement of p-type Mg-doped GaN grown by MBE using ammonia. With the introduction of a moderate nitrogen plasma, we have achieved p-type Mg-doped GaN films with a hole density of 4×1017 cm−3 and a mobility of 15 cm2/V-s at room temperature.
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Yang, Z., Li, L. & Wang, W. P-type Mg-doped GaN grown by molecular beam epitaxy using ammonia as the nitrogen source. MRS Online Proceedings Library 395, 169–173 (1995). https://doi.org/10.1557/PROC-395-169
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DOI: https://doi.org/10.1557/PROC-395-169