Abstract
Passivation of III–V compounds, especially GaAs, is still a major problem. Surface mechanisms related to stoichiometry defects (free As formation, vacancies) play an important role in the detrimental effects observed on GaAs devices (interface traps, leakage currents, parasitic transients …).
We first analyze the phenomena occuring at GaAs (100) surfaces exposed to several (H2, N2) multipolar plasmas, with the following methods:
-
in situ study of the surface morphology and roughness using ellipsometry and electron diffraction
-
chemical analysis using photoemission and Auger spectroscopy
-
electrical analysis in situ (Fermi level position deduced from photoemission, work function measurements) or ex situ (device characterization, C(V) analysis).
Using H2 based plasma treatments, a complete cleaning (oxide and contamination removal) can be obtained at moderate (below 200 °C) temperatures. This process, associated with surface nitridation and dielectric deposition, yield improved surface properties (lower recombination velocity and reduction of devices parasitic effects).
The case of Ga1−xInxAs (100) surfaces (with x varying from 0 to 0.53)is then discussed and a comparative study is given, indicating that native nitridation may also be a good solution, in this case.
Similar content being viewed by others
References
for a recent review, see for instance M. ROCCHI, Proceedings of the ESSDERC Conference (Lille, France, Sept. 84) Physica B special issue.
Silicon nitride gallium arsenide MIS structure produces by plasma enhanced deposition. Burhan BAYRAKTAROGLU and Robert L. JOHNSON J. Appl. Phys. 52 (1981).
Improvements in GaAs/plasma deposited silicon nitride surface quality by predeposition GaAs surface treatment and post-deposition annealing. M.D. CLARK and C.L. ANDERSON, 3. Vac. Sci. Technol. 21 (1982).
G.P. SCHWARTZ, B. SCHWARTZ, J.E. GRIFFITHS and T. SUGANO J. Electrochem. Soc. 127, 2269 (1980).
Influence of interfacial structure on the electronic properties of SiO2/InP MISFET’s. K.M. GEIB, S.M. GOODNICK, D.Y. LIN, R.G. GANN, C.W. WILMSEN and J.F. WAGER. J. Vac.Sci. Technol. B2, 516 (1984).
P.J. SMITH and D.A. ALLAN, Vacuum 34, 209 (1984).
P. KWAN, K.N. BHAT, J.M. BORREGO and S.K. GANDHI Solid State Electron. 26, 125 (1983).
P. LANGLADE and S. MAKRAM-EBEID, Proceeding of the 11th Intern. Conf. on GaAs and related compounds, Biarritz (Sept. 84), ed. The Institute of Physics.
S. GOURRIER, A. MIRCEA and M. BACAL, Thin Solid Silms 65, 315 (1980).
S. GOURRIER, L. SMIT, P. FRIEDEL and P.K. LARSEN J. Appl. Phys. 54, 3993 (1983).
R.P.H. CHANG and S. DARACK Appl. Phys. Lett. 38, 898 (1981)
G. SMOLINSKY, R.P.H. CHANG and T.M. MAYER J. Vac. Sci. Technol. 18, 12 (1981).
T. CARETTE, M. LANNOO, G. ALLAN, P. FRIEDEL Accepted for publication in Surface Science.
P.D. GARDNER, S. YEGNA NARAYAN and YONG-HOON YUN Thin Solid Films 117, 173 (1984).
S. GOURRIER and J.P. CHANE Electron. Lett. 18, 156 (1982).
Author information
Authors and Affiliations
Rights and permissions
About this article
Cite this article
Theeten, J.B., Gourrier, S., Friedel, P. et al. Plasma Passivation Scheme for III–V Compound Semiconductor Surfaces. MRS Online Proceedings Library 38, 499–510 (1984). https://doi.org/10.1557/PROC-38-499
Published:
Issue Date:
DOI: https://doi.org/10.1557/PROC-38-499