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The Micro-Structure and Electron Conduction Mechanism of Hydrogenated Nano-Crystalline Silicon Films

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Abstract

The hydrogenated nano-crystalline silicon (nc-Si:H) films have been deposited with PECVD method. The micro-structure of these films has been studied by TEM and HREM. The PECVD nc-Si:H films show fiber texture structure which is exceptional compared with the nano-size materials made by the method of compressing granules method. The fractal dimention of this texture structure has been calculated with a Fourier filtered image. The relationshisps between conductivity and temperature and micro-structure has also been studied and the mechanism of electron conduction is discussed.

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References

  1. Y. He, C. Yin, W. Tang and T. Gong, Physics and Chemistry of Finite Systems: From Clusters to Crystals, edited by P. Jena, S.N. Khanna and B.K. Rao, Vol. II, p. 1245 (1992).

    Google Scholar 

  2. Yuliang He, Hsiangna Liu, Zhichao Wang, Guangxu Cheng, Luchun Wang and Shidong Yu, Science in China 35 (2), 255 (1993). (in English)

    Google Scholar 

  3. H. Gleiter, Prog. in Materials’ Science Vol 33, 223 (1989).

    Article  CAS  Google Scholar 

  4. S. Veprek, F.A. Sarott, Phys. Rev. B, 36 (6), 333 (1987).

    Article  Google Scholar 

  5. A. G. Cullis, Electron Microscopy, Vol. 2, European Elactron Microscopy Conference, Granada, Spain, 1992, pp. 71–75.

    Google Scholar 

  6. P. Forrest et al, J. Phys. A 12, LI09 (1979).

    Article  Google Scholar 

  7. F. Wang, H.N. Liu, Y.L. He, A. Schweiger and R. Schwarz, J. Non-Cryst. Solids 137 & 138, 511 (1991).

    Article  Google Scholar 

  8. Tang Wanguo, Gong Tao, Li Ziyuan, Liu Hsiangna and He Yuliang, Proc. of the 21st International Conference On The Physics Of Semiconductors (Bei**g, China, Aug 1992) ThP-177.

    Google Scholar 

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Acknowledgments

The authors would like to thank Mr. Qinghai Fang for samples preparation, Prof. Shusheng Jiang for the TEM and HREM work and Prof. Qi Li and Prof. Hengnan Zhou for helpful discussions. This work is suported by the National Science Foundation of China and partly suported by the Lab. of SS M, Nan**g University.

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Authors and Affiliations

  1. The Amorphous Physics Research Laboratory, Bei**g University of Aeronautics and Astronautics, Bei**g, 100083, P.R. China

    Yuliang He

  2. Bei**g Laboratory of Election Microscopy, Chinese Academy of Sciences, Bei**g, 100080, P.R. China

    Yiming Chu

  3. Department of Electronic Engineering, Bei**g Institute of Technology, Bei**g, 100081, P.R. China

    Hongyi Lin

  4. Department of Physics, Peking University, Bei**g, 100871, P.R. China

    Guoguang Qin

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  1. Yuliang He
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  2. Yiming Chu
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  3. Hongyi Lin
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  4. Guoguang Qin
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He, Y., Chu, Y., Lin, H. et al. The Micro-Structure and Electron Conduction Mechanism of Hydrogenated Nano-Crystalline Silicon Films. MRS Online Proceedings Library 283, 537–542 (1992). https://doi.org/10.1557/PROC-283-537

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