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Lead Zirconate-Titanate Thin Films Prepared by the Laser Ablation Technique

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Abstract

Lead zirconate-titanate (PZT) thin films were prepared by the laser ablation technique. The PZT (Zr/Ti=53/47) target was irradiated using a focused q-switched Nd:YAG laser (15 ns, 100 mJ at 1.064 μm). The as-deposited films were amorphous as indicated by X-ray powder patterns, but crystallized readily with brief annealing above 650°C. The dielectric constant and the resistivity of the crystallized films were studied using a parallel-plate type capacitor structure.

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Authors and Affiliations

  1. National Institute of Standards and Technology Gaithersburg, MD, 20899

    C. K. Chiang, L. P. Cook & P. K. Schenck

  2. Harry Diamond Laboratories Adelphi, MD, 20783

    P. S. Brody & J. M. Benedetto

Authors
  1. C. K. Chiang
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  2. L. P. Cook
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  3. P. K. Schenck
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  4. P. S. Brody
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  5. J. M. Benedetto
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Chiang, C.K., Cook, L.P., Schenck, P.K. et al. Lead Zirconate-Titanate Thin Films Prepared by the Laser Ablation Technique. MRS Online Proceedings Library 200, 133–137 (1990). https://doi.org/10.1557/PROC-200-133

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