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Multilayer Analysis by Focused MeV Ion Beam

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Abstract

A high-energy (MeV) helium ion beam has been focused down to l μm by a combination of piezo-driven objective slits and a magnetic quadrupole doublet. Rutherford backscattering (RBS) map** techniques using focused MeV ion beams were, for the first time, applied to multilayered structures of metals, isolated with insulators, representing a test structure for multilayered wiring or interconnections of integrated circuits to nondestructively analyze the imperfection of the structures.

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References

  1. M. Takai, K. Gamo, K. Masuda and S. Namba: Japan. J. Appl. Phys. 12, 1926 (1973)

    Article  CAS  Google Scholar 

  2. M. Takai, K. Gamo, K. Masuda and S. Namba: Japan. J. Appl. Phys. 14, 1935 (1975)

    Article  CAS  Google Scholar 

  3. Backscatterinq Spectrometry, edited by W.K. Chu, J.W. Mayer and M.A. Nicolet (Academic Press, New York, 1978)

  4. G.J.F. Legge: Nucl. Instrum. and Methods. 197, 243 (1982)

    Article  CAS  Google Scholar 

  5. R. Nobiling: Nucl. Instrum. and Methods. 218, 197 (1983)

  6. P. Bayerl and P. Eichinger: Nucl. Instrum. and Methods. 149, 663 (1978)

    Article  CAS  Google Scholar 

  7. H. Kneis, B. Martin, R. Nobiling, B. Povh and K. Traxel: Nucl. Instrum. and Methods. 197, 79 (1982)

    Article  CAS  Google Scholar 

  8. M. Takai, K. Matsunaga, K. Inoue, M. Izumi, K. Gamo, M. Satou, and S. Namba, Japan. J. Appl. Phys. 26, L550 (1987)

    Article  Google Scholar 

  9. M. Takai, A. Kinomura, K. Inoue, K. Matsunaga, M. Izumi, K. Gamo, S. Namba, and M. Satou, in Proc. of the Ist Intern. Conf. on Nuclear Microprobe Technoloqy and Applications, edited by G.W. Grime and F. Watt (to be published in Nucl. Instrum. and Methods 1988)

  10. A. Kinomura, M. Takai, K. Inoue, K. Matsunaga, M. Izumi, T. Matsuo, K. Gamo, S. Namba, and M. Satou, in Proc. of the 12th Intern. Conf. on Atomic Collisions in Solids, edited by F. Fujimoto (to be published in Nucl. Instrum. and Methods 1988)

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Acknowledgements

The microbeam line at the Government Industrial Research Institute Osaka is an adaptation and modification of the Heidelberg system. The authors are indebted to K. Traxel for his advice on the construction of the beam line in the initial stage of this study.

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Authors and Affiliations

  1. Faculty of Engineering Science, Osaka University, Toyonaka, 560, Osaka, Japan

    M. Takai, A. Kinomura, M. Izumi, K. Matsunaga, K. Inoue, K. Gamo & S. Namba

  2. Government Industrial Research Institute Osaka, Ikeda, 563, Osaka, Japan

    M. Satou

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  1. M. Takai
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  2. A. Kinomura
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  3. M. Izumi
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  4. K. Matsunaga
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  5. K. Inoue
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  6. K. Gamo
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  7. M. Satou
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  8. S. Namba
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Takai, M., Kinomura, A., Izumi, M. et al. Multilayer Analysis by Focused MeV Ion Beam. MRS Online Proceedings Library 108, 51–56 (1987). https://doi.org/10.1557/PROC-108-51

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  • DOI: https://doi.org/10.1557/PROC-108-51

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