Abstract.
GaN-based airpost pillar microcavities are realized by focused-ion beam etching starting from an all-epitaxially grown vertical-cavity surface-emitting laser structure. Pillar diameters below 1 μm are well controllable. The sidewalls are smooth and show a damaged surface layer of a thickness less than 2 nm only. Micro-photoluminescence measurements reveal the longitudinal and transversal mode spectra of the cavities in good agreement with theoretical calculations based on a vectorial transfer-matrix method.
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Lohmeyer, H., Sebald, K., Gutowski, J. et al. Resonant modes in monolithic nitride pillar microcavities. Eur. Phys. J. B 48, 291–294 (2005). https://doi.org/10.1140/epjb/e2005-00418-6
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DOI: https://doi.org/10.1140/epjb/e2005-00418-6