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Investigation of the Effect of Hydrogen Content on the Conductivity of Nanocrystalline Diamond Films

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Abstract

the results are presented for investigation of electrical conductivity of nano crystalline diamond (NCD) films with thickness of 0.5–0.6 microns grown on silicon Si(100) substrates by the CVD metho d using methane-hydrogen and methane-hydrogen-oxygen mixtures. By the metho d of heating in vacuum with using hydrogen analyzer AB-1, the concentration of hydrogen in the studied films was determined and the relationship between the content of hydrogen in the NCD film and its conductivity was estimated. It has been shown that high-temperature processing in vacuum at the temperature of 600°C leads to desorption of hydrogen from the films and to a significant increase in their resistance.

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REFERENCES

  1. O. A. Williams, M. Nesladek, J. J. Mares, P. Hublk, in Physics and applications of CVD diamond, ed. by S. Koizumi, C. Nebel, M. Nesladek (Wiley-VCH, 2008), p. 13.

    Google Scholar 

  2. J. Kusterer, E Kohn, in CVD diamond for electronic devices and sensors, ed. by R. S. Sussmann (Wiley, 2009), p. 469.

    Google Scholar 

  3. A. V. Sumant, O. Auciello, R. W. Carpick, S. Srinivasan, J. E. Butler, MRS Bull., 35, 281 (2010). https://doi.org/10.1557/mrs2010.550

    Article  CAS  Google Scholar 

  4. I.-N. Lin, S. Koizumi, J. Yater, F. Koeck, MRS Bull., 39, 533 (2014). https://doi.org/10.1557/mrs.2014.101

    Article  CAS  Google Scholar 

  5. K. J. Sankaran, K. Haenen, in: Novel aspects of diamond, ed. by N. Yang (Springer, 2019), p. 123.

    Google Scholar 

  6. O. Auciello, J. Birrell, J. Carlisle, J. Gerbi, X. **ao, B. Peng, H. Espinosa, J. Phys.: Condens. Matter, 16, 539 (2004). https://doi.org/10.1088/0953-8984/16/16/R02

    Article  ADS  CAS  Google Scholar 

  7. M. Lions, S. Saada, M. A. Pinault, F. Andrieu, O. Faynot, P. Bergonzo, AIP Conf. Proc., 1292, 129 (2010). https://doi.org/10.1063/1.3518278

    Article  ADS  CAS  Google Scholar 

  8. A. L. Vikharev, S. A. Bogdanov, N. M. Ovechkin, O. A. Ivanov, D. B. Radishchev, A. M. Gorbachev, M. A. Lobaev, A. Ya. Vul’, A. T. Dideykin, S. A. Kraev, S. A. Korolev, FTP, 55 (1), 49 (2021) (in Russian). https://doi.org/10.21883/FTP.2021.01.50387.9520

  9. C. A. Zorman, G. T. Mearini, R. W. Hoffman, Diamond Relat. Mater., 9, 1518 (2000). https://doi.org/10.1016/S0925-9635(00)00278-8

    Article  ADS  CAS  Google Scholar 

  10. C. J. Tang, L. P. Gu, J. Gracio, J. L. Ribeiro, Phys. Status Solidi A, 206, 2816 (2009). https://doi.org/10.1002/pssa.200925147

    Article  ADS  CAS  Google Scholar 

  11. A. M. Polyansky, V. A. Polyansky, Yu. A. Yakovlev, N. A. Feoktistov, V. G. Golubev, A. Ya. Vul’, Pis’ma v ZhTF, 41 (11), 56 (2015) (in Russian).

    Google Scholar 

  12. A. M. Polyansky, L. A. Konopel’ko, V. A. Polyansky, Yu. A. Yakovlev, Izmeritel’naya tekhnika, 9, 65 (2019) (in Russian). https://doi.org/10.32446/0368-1025it.2019-9-65-71

  13. S. J. Harris, A. M. Weiner, Appl. Phys. Lett., 55, 2179 (1989). https://doi.org/10.1063/1.102350

    Article  ADS  CAS  Google Scholar 

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Funding

The study was accomplished in the framework of State Assignment of the Institute of Applied Physics RAS (project 0030-2021-0003).

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Authors and Affiliations

  1. Institute of Applied Physics, Russian Academy of Sciences, Nizhny Novgorod, Russia

    O. A. Ivanov, A. L. Vikharev, S. A. Bogdanov & N. M. Ovechkin

  2. Institute for Problems in Mechanical Engineering of the Russian Academy of Sciences, St. Petersburg, Russia

    V. P. Loginov & Yu. A. Yakovlev

  3. Ioffe Institute, St. Petersburg, Russia

    A. Ya. Vul’

Authors
  1. O. A. Ivanov
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  2. A. L. Vikharev
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  3. S. A. Bogdanov
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  4. N. M. Ovechkin
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  5. V. P. Loginov
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  6. Yu. A. Yakovlev
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  7. A. Ya. Vul’
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Correspondence to A. L. Vikharev.

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Ivanov, O.A., Vikharev, A.L., Bogdanov, S.A. et al. Investigation of the Effect of Hydrogen Content on the Conductivity of Nanocrystalline Diamond Films. Tech. Phys. Lett. 49 (Suppl 4), S311–S314 (2023). https://doi.org/10.1134/S1063785023010169

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