Abstract
Problems of simulating an electrostatic micromotor based on the SOI structure with the use of application programs are discussed. Results of calculating the construction of the electrostatic micromotor over a wide frequency range are presented. It is shown that, when increasing the direct voltage applied to control electrodes, the useful capacity increases and the parasitic capacity decreases; at the same time, the front of the amplitude-frequency characteristic is transferred to the low-frequency region.
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Original Russian Text © V.V. Amelichev, I.V. Godovitsyn, A.V. Il’kov, A.Yu. Kostromin, 2012, published in Izvestiya Vysshikh Uchebnykh Zavedenii. Elektronika, 2012, No. 1, pp. 43–47.
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Amelichev, V.V., Godovitsyn, I.V., Il’kov, A.V. et al. Simulation of micromotor based on SOI structure. Russ Microelectron 41, 419–423 (2012). https://doi.org/10.1134/S1063739712070165
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DOI: https://doi.org/10.1134/S1063739712070165