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Improving the Stability of the Optical System of a Laser Source Based on a Position-Sensitive Detector

  • OPTICAL SOURCES AND RECEIVERS FOR ENVIRONMENTAL STUDIES
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Abstract

Results of numerical and experimental studies on monitoring and control for optical elements of an electric discharge KrF laser by the method of density-based spatial clustering of applications with noises (DBSCAN) are presented. Different methods of processing digital signals obtained using a position-sensitive detector controlling the position of the optical axis of the laser system are considered. A numerical model of optical system stability is developed based on the DBSCAN method with an additional inclusion of digital signal processing with the use of the cumulative moving average. A technique for correction of controlled mirrors with an accuracy of 60 ± 10 µrad for their return to normal position is proposed and implemented; the alignment time does not exceed 5 min.

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Funding

This work was supported by the Russian Foundation for Basic Research (project nos. 20-08-00371-a and 20-58-00008 Bel_a) and within the framework of the state contract for Fundamental Scientific Research, Siberian Branch, Russian Academy of Sciences (no. FWRM-2021-0014).

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Authors and Affiliations

  1. Shenyang Ligong University, 110159, Shenyang, Liaoning, P.R. China

    Hongda Li

  2. Tomsk State University, 634050, Tomsk, Russia

    M. V. Andreev, Yu. N. Panchenko & A. V. Puchikin

  3. Institute of High Current Electronics, Siberian Branch, Russian Academy of Sciences, 634055, Tomsk, Russia

    Yu. N. Panchenko

Authors
  1. Hongda Li
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  2. M. V. Andreev
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  3. Yu. N. Panchenko
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  4. A. V. Puchikin
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Corresponding authors

Correspondence to Hongda Li, M. V. Andreev, Yu. N. Panchenko or A. V. Puchikin.

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The authors declare that they have no conflicts of interest.

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Hongda Li, Andreev, M.V., Panchenko, Y.N. et al. Improving the Stability of the Optical System of a Laser Source Based on a Position-Sensitive Detector. Atmos Ocean Opt 35, 615–619 (2022). https://doi.org/10.1134/S1024856022050128

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  • DOI: https://doi.org/10.1134/S1024856022050128

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