Abstract
Potential applications of electron paramagnetic resonance (EPR) for investigating and controlling the process of neutron transmutation do** (NTD) of semiconducting germanium, silicon, and silicon carbide are discussed. It is shown that EPR enables one to control the process of annealing of radiation-induced defects in semiconductors subject to neutron irradiation and to detect the shallow donors restored in the process of annealing of donor-compensating defects by observing EPR signals from these donors. EPR can be used to separately detect isolated donors and clusters of two, three, and more exchange-bound donor atoms and thereby determine the degree of nonuniformity of the impurity distribution over the crystal. Neutron transmutation do** is demonstrated to produce a fairly uniform arsenic-donor distribution in a germanium crystal. It is argued that semiconductors enriched in the selected isotopes should be used for NTD. The results of an investigation of phosphorus donors in silicon carbide are presented.
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Translated from Fizika Tverdogo Tela, Vol. 45, No. 6, 2003, pp. 984–995.
Original Russian Text Copyright © 2003 by Baranov, Ionov, Il’in, Kop’ev, Mokhov, Khramtsov.
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Baranov, P.G., Ionov, A.N., Il’in, I.V. et al. Electron paramagnetic resonance in neutron-transmutation-doped semiconductors with a changed isotopic composition. Phys. Solid State 45, 1030–1041 (2003). https://doi.org/10.1134/1.1583785
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DOI: https://doi.org/10.1134/1.1583785