SpringerLink
Log in

Nanofabrication meets open science

  • Comment
  • Published:

From Nature Nanotechnology

View current issue Submit your manuscript

Sharing the step-by-step procedures necessary to fabricate nanostructures could optimize efforts to achieve reproducible devices.

This is a preview of subscription content, log in via an institution to check access.

Access this article

Log in via an institution

Subscribe and save

Springer+ Basic
EUR 32.99 /Month
  • Get 10 units per month
  • Download Article/Chapter or Ebook
  • 1 Unit = 1 Article or 1 Chapter
  • Cancel anytime
Subscribe now

Buy Now

Price includes VAT (United Kingdom)

Instant access to the full article PDF.

Institutional subscriptions

Fig. 1: Tacit knowledge in nanofabrication process development.

References

  1. Norte, R. A. Nanofabrication for On-Chip Optical Levitation, Atom-Trap**, and Superconducting Quantum Circuits. PhD thesis, California Institute of Technology (2015).

  2. Stanford Nanofabrication Facility. https://snfexfab.stanford.edu/snf/projects-processes/processes

  3. Birck Nanotechnology Center. https://www.purdue.edu/discoverypark/birck/

  4. Bereyhi, M. https://nanofab-net.org/media/Al2O3_LPCVD_pinhole.pdf

  5. Zenodo. http://zenodo.org

  6. BioProtocol. https://bio-protocol.org

  7. SpringerProtocol. https://experiments.springernature.com/

  8. OpenWetWare. https://openwetware.org

  9. https://www.comsol.ch/model/optical-ring-resonator-notch-filter-22221

  10. Liu, J. et al. Nat. Photonics 14, 486–491 (2020).

    Article  CAS  Google Scholar 

  11. Pfeiffer, M. H. P. Photonic Damascene Process for Integrated High Q Microresonator Based Nonlinear Photonic Devices. PhD thesis, EPFL (2018).

  12. Beccari, A., Engelsen, N. J., Fedorov, S., Bereyhi, M. & Kippenberg, T. Bull. Am. Phys. Soc. https://meetings.aps.org/Meeting/MAR21/Session/P27.9 (2021).

Download references

Acknowledgements

This work was supported by funding from the EPFL Open Science Fund.

Author information

Authors and Affiliations

  1. Institute of Physics, Swiss Federal Institute of Technology Lausanne (EPFL), Lausanne, Switzerland

    Mohammad J. Bereyhi & Tobias J. Kippenberg

Authors
  1. Mohammad J. Bereyhi
    View author publications

    You can also search for this author in PubMed Google Scholar

  2. Tobias J. Kippenberg
    View author publications

    You can also search for this author in PubMed Google Scholar

Corresponding author

Correspondence to Mohammad J. Bereyhi.

Ethics declarations

Competing interests

The authors declare no competing interests.

Rights and permissions

Reprints and permissions

About this article

Check for updates. Verify currency and authenticity via CrossMark

Cite this article

Bereyhi, M.J., Kippenberg, T.J. Nanofabrication meets open science. Nat. Nanotechnol. 16, 850–852 (2021). https://doi.org/10.1038/s41565-021-00944-x

Download citation

  • Published:

  • Issue Date:

  • DOI: https://doi.org/10.1038/s41565-021-00944-x

  • Springer Nature Limited

This article is cited by

Search

Navigation