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Application of impedance spectroscopy for the investigation of MIS structures with barium strontium titanate

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Abstract

Complex impedance spectroscopy was used for the investigation of MIS gate-stack structures with barium strontium titanate. Using a spectroscopic plot of the imaginary part of the impedance versus frequency, the different capacitive components of the MIS structure were evaluated. The BSTO relative dielectric constant εr was determined from the capacitive components.

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References

  1. G. D. Wilk, R. M. Wallance and J. M. Authony, J. Appl. Phys. 89 (2001) 5243.

    Google Scholar 

  2. K. Eisenbeiser, J. M. Finder, Z. Yu, J. Ramdni, J. A. Curless, and J. A. Hllmrk, Appl. Phys. Lett. 76 (2000) 1334.

    Google Scholar 

  3. P. Vitanov, A. Harizanova, T. Ivanova, D. Velkov and Z. Raytcheva, Vacuum 68 (2002) 371.

    Google Scholar 

  4. A. Mosset, I. Gautier-Lunean and J. Gaaly, J. Non-Cryst. Solids 100 (1988) 44.

    Google Scholar 

  5. O. A. Harizanov, Mater. Lett. 34 (1998) 6.

    Google Scholar 

  6. O. A. Harizanov, ibid. 34 (1998) 50.

    Google Scholar 

  7. W. Kaiser, H. Frisch and D. Reiss, Phys. Rev. 112 (1958) 1546.

    Google Scholar 

  8. D. C. Sinclair and R. West, J. Appl. Phys. 66 (1989) 3850.

    Google Scholar 

Download references

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Authors and Affiliations

  1. Central Laboratory for Solar Energy and New Energy Sources, Bulgarian Academy of Sciences, Blvd. Tzarigradsko Chaussee 72, 1784, Sofia, Bulgaria

    K. Ivanova, P. Vitanov, A. Harizanova & H. R. Dikov

Authors
  1. K. Ivanova
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  2. P. Vitanov
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  3. A. Harizanova
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  4. H. R. Dikov
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Ivanova, K., Vitanov, P., Harizanova, A. et al. Application of impedance spectroscopy for the investigation of MIS structures with barium strontium titanate. Journal of Materials Science: Materials in Electronics 14, 803–804 (2003). https://doi.org/10.1023/A:1026117607489

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  • DOI: https://doi.org/10.1023/A:1026117607489

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