Abstract
Rapid sintering of Yb2O3-added AlN was performed by applying the 28 GHz millimeter-wave heating method. It was found that full densification over 97%T.D. was attained by sintering at 1600°C for 20 min. The densification temperature was decreased by about 300°C, compared with those in the conventional method by an electric furnace. A high thermal conductivity over 180 W/(m · K) was obtained in the sample sintered at 1700°C for 40 min, even under non-reducing atmosphere. The main factor resulting in the rapid and low temperature sintering was attributed to efficient selective absorption of the millimeter-wave into Yb2O3 additive.
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Yoshioka, T., Makino, Y. & Miyake, S. Low temperature sintering of aluminum nitride with millimeter-wave heating. Journal of Materials Science 38, 101–106 (2003). https://doi.org/10.1023/A:1021118000721
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DOI: https://doi.org/10.1023/A:1021118000721