Log in

Ceramic thin film thickness determination by nano-indentation

  • Published:
Journal of Materials Science Letters

Abstract

Abstracts are not published in this journal

This is a preview of subscription content, log in via an institution to check access.

Access this article

Subscribe and save

Springer+ Basic
EUR 32.99 /Month
  • Get 10 units per month
  • Download Article/Chapter or Ebook
  • 1 Unit = 1 Article or 1 Chapter
  • Cancel anytime
Subscribe now

Buy Now

Price excludes VAT (USA)
Tax calculation will be finalised during checkout.

Instant access to the full article PDF.

Similar content being viewed by others

References

  1. W. C. OLIVER and G. M. PHARR, J. Mater. Res. 7–6 (1992) 1564.

    CAS  Google Scholar 

  2. E. FELDER, P. LAVAL and C. ANGELELIS, in Actes des journées scientifiques 1995 de la société tribologique de France(SIRPE EDITEUR, Paris, 1995) 191.

    Google Scholar 

  3. H. BÙCKLE, in Publications scientifiques et techniques du ministère de l’air, N. T. N•90, Paris (1960).

  4. D. LEBOUVIER, P. GILORMINI and E. FELDER, Thin Solid Films 172(1979) 227.

    Article  Google Scholar 

  5. M. V. SWAIN and J. MENCIK, Thin Solid Films 253(1994) 204.

    Article  CAS  Google Scholar 

Download references

Author information

Authors and Affiliations

Authors

Rights and permissions

Reprints and permissions

About this article

Cite this article

MARIE, S., NADAL, M., DUCARROIR, M. et al. Ceramic thin film thickness determination by nano-indentation. Journal of Materials Science Letters 16, 722–725 (1997). https://doi.org/10.1023/A:1018520828529

Download citation

  • Issue Date:

  • DOI: https://doi.org/10.1023/A:1018520828529

Keywords

Navigation