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Determination of tensile properties and residual stresses of Ni-Co thin films

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Abstract

This paper reports tensile properties and residual stresses of Ni-Co thin films. To measure elastic (and plastic) properties, direct tensile tests using dog-bone type specimens are performed first. Assuming that residual stresses vary linearly through the film thickness, bending and membrane residual stress components are measured using cantilever beam and T-structure beam specimens, respectively. Averaged values of Young’s modulus, yield strength and tensile strength are found to be about 163GPa, 1,700MPa and 2,000MPa, respectively. The membrane and bending residual stress components are found to be about 825MPa and 47MPa, respectively.

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Abbreviations

t :

thickness of specimens

L :

length of specimens

δ c :

vertical end-deflection of cantilever beam specimens, Fig. 5(a)

δ t :

transverse displacement measured in the T-structure beam specimens, Fig. 8(a)

δ s :

vertical deflection measured in the T-structure beam specimens, Fig. 16(a)

b :

width of cantilever beam specimens, Fig. 5(a)

L s :

length of stem in T-structure beam specimens, Fig. 8(a)

W :

width of stem in T-structure beam specimens, Fig. 8(a)

E :

Young’s modulus

σ 0.2 :

yield (0.2% proof) strength

σ b :

bending residual stress

σ m :

membrane residual stress

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Authors and Affiliations

  1. Department of Mechatronics Engineering, Tongmyong University, Yongdang-Dong, Nam-Gu, Busan, Korea, 608-711

    Jun-Hyub Park

  2. Department of Mechanical Engineering, Korea University, Anam-Dong, Sungbuk-Ku, Seoul, Korea, 136-701

    Hong-Yeol Bae & Yun-Jae Kim

Authors
  1. Jun-Hyub Park
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  2. Hong-Yeol Bae
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  3. Yun-Jae Kim
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Correspondence to Yun-Jae Kim.

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Park, JH., Bae, HY. & Kim, YJ. Determination of tensile properties and residual stresses of Ni-Co thin films. Int. J. Precis. Eng. Manuf. 11, 771–778 (2010). https://doi.org/10.1007/s12541-010-0091-3

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