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Deposition Behavior and Microstructural Features of Vacuum Kinetic Sprayed Aluminum Nitride

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Abstract

The vacuum kinetic spray (VKS) method is a relatively advanced technology by which thin and dense ceramic coatings can be fabricated via the high-speed impact of submicron-sized particles at room temperature. However, the actual bonding mechanism associated with the VKS process has not yet been elucidated. In this study, AlN powders were pretreated through ball-milling and heat-treatment processes in order to investigate the effects of microstructural changes on the deposition behavior. It was found that ball-milled and heat-treated powder with polycrystals formed by partially aligned dislocations showed considerably higher deposition rates when compared to only ball-milled powder with tangled dislocations. Therefore, in the VKS process, the deposition behavior is shown to be affected by not only the particle size and defect density, but also the microstructure of the feedstock powder.

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Acknowledgments

This work was supported by a Grant from the National Research Foundation of Korea (NRF) funded by the Korean Government (MEST) (No. 2012-0005448).

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Correspondence to Changhee Lee.

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This article is an invited paper selected from presentations at the 2012 International Thermal Spray Conference and has been expanded from the original presentation. It is simultaneously published in Thermal Spray 2012: Proceedings of the International Thermal Spray Conference, Air, Land, Water, and the Human Body: Thermal Spray Science and Applications, Houston, Texas, USA, May 21-24, 2012, Basil R. Marple, Arvind Agarwal, Laura Filofteia-Toma, Margaret M. Hyland, Yuk-Chiu Lau, Chang-Jiu Li, Rogerio S. Lima, and André McDonald, Ed., ASM International, Materials Park, OH, 2012.

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Park, H., Heo, J., Cao, F. et al. Deposition Behavior and Microstructural Features of Vacuum Kinetic Sprayed Aluminum Nitride. J Therm Spray Tech 22, 882–891 (2013). https://doi.org/10.1007/s11666-013-9923-x

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  • DOI: https://doi.org/10.1007/s11666-013-9923-x

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