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Investigation of Rotating Arc-Catalytic Reactor for CF4 Removal with High Energy Efficiency

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Abstract

CF4 is commonly used in semiconductor industries, and its removal requires a large amount of energy because it is a highly stable perfluorinated compound. In this study, a rotating arc-catalytic reactor that uses thermal plasma as the heat source for catalysts is introduced as an efficient method for CF4 removal. An AC rotating arc plasma was used with the catalyst for CF4 removal, and the plasma and catalyst were configured serially in this reactor. Destruction and removal efficiency (DRE) of CF4 and the energy efficiency of the removal process were experimentally investigated in the input power range of 2–3 kW and a steam-to-CF4 molar ratio of up to 20. The obtained results suggest that the DRE of CF4 was up to 98% and the energy efficiency was as high as 36.1 g/kWh, which is approximately 3.5 times higher than that obtained using a rotating arc reactor alone. In addition, the thermal efficiency was estimated to be approximately 67%, based on the temperatures of the inlet and outlet gases of the rotating arc-catalytic reactor. Thus, further improvement in the performance can be expected through subsequent thermal management and system optimization. These results confirm that using rotating arc-catalytic reactors is an energy-efficient strategy for application as scrubber systems to remove CF4.

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Acknowledgements

Dr. Sungkwon Jo and Mr. Donghyun Cho contributed equally to this work. The authors acknowledge the financial support received from the Ministry of Science and ICT of the Republic of Korea (Grant Number NK236F).

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  1. Dr. Sungkwon Jo and Mr. Donghyun Cho contributed equally to this work.

Authors and Affiliations

  1. Korea Institute of Machinery and Materials, 156 Gajeongbuk-ro, Yuseong-gu, Daejeon, 34103, Republic of Korea

    Sungkwon Jo, Donghyun Cho, Dae Hoon Lee & Woo Seok Kang

  2. University of Science and Technology (UST), 217 Gajeong-ro, Yuseong-gu, Daejeon, 34113, Republic of Korea

    Sungkwon Jo, Donghyun Cho, Dae Hoon Lee & Woo Seok Kang

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  1. Sungkwon Jo
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Correspondence to Sungkwon Jo or Donghyun Cho.

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Jo, S., Cho, D., Lee, D.H. et al. Investigation of Rotating Arc-Catalytic Reactor for CF4 Removal with High Energy Efficiency. Plasma Chem Plasma Process 42, 1311–1327 (2022). https://doi.org/10.1007/s11090-022-10274-y

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