Abstract
The Space High-Cadence Observing Telescope (SHOT) is proposed as a spaceborne 0.8-meter terahertz camera with remarkable imaging speed, aimed at conducting the inaugural large-sky terahertz survey and unlocking a pioneering realm for exploring the dynamic universe. Kinetic Inductance Bolometers (KIBs) represent a viable technique for the focal plane detector arrays of SHOT. In this paper, we present the design of a lumped-element kinetic inductance detector (LEKID) as the KIB detector, featuring various interdigital capacitors (IDCs) for tuning the resonator frequency. In KIB detector, the inductive component of the LEKID is thermally isolated from the substrate by a normal metal antenna, which serves to absorb terahertz signals. We conducted characterization on non-thermally isolated LEKID at temperatures of 1.5 and 0.01 Kelvin. The KIB design and fabrication processes have been established and the devices are fabricated with a 91.5% mechanical yield. The results form a foundation to build large arrays of KIB detectors using existing manufacturing technologies for SHOT.
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Acknowledgements
This research has received support from various funding sources, including the National Key Research and Development Program of China (Grant No. 2020YFC2201700), the National Natural Science Foundation of China (Grant No. 12303095, 12303096, 62001204), Zhejiang Lab Funding (Grant No. 2021PE0AC03, G2023XX0AC06), and the Natural Science Foundation of Sichuan Province (Grant No. 2022NSFSC0518). The authors would like to express their gratitude to the Nano Fabrication Center of Zhejiang Laboratory for their valuable assistance in device process development. Additionally, they extend their appreciation to Dr. Renshuang Zhai from the Material Experiment Platform at Zhejiang Lab for providing support in XRD and AFM measurements, as well as for aiding in data interpretation.
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S.Y., and X.Z., wrote the main manuscript text and prepared figures and tables. X.Z. fabricated the devices. S.Y., X.Y., R.F, performed the measurement under the supervision of X.Z, R. D., and D.L.. X.Z., R. D., and D.L. proposed the idea. All authors reviewed the manuscript.
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Yu, S., Yang, L., Yan, X. et al. Development of Kinetic Inductance Bolometers for the Space High-Cadence Observing Telescope. J Low Temp Phys 215, 276–284 (2024). https://doi.org/10.1007/s10909-024-03097-y
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DOI: https://doi.org/10.1007/s10909-024-03097-y