Abstract
WN/a-Si3N4 thin films have been synthesized by utilizing the energetic ion/electron species emanated from hot, dense pinched plasma column in UNU/ICTP plasma focus operated with nitrogen gas. Structural, chemical, morphological and mechanical properties of synthesized films are studied using X-ray diffraction (XRD), X-ray photoelectron spectroscopic (XPS), field emission scanning electron microscopy (FESEM) and nano-indentation respectively. XRD spectra show WN2, WN, WSi2 phases on exposed samples. XPS results confirm W–Si–N chemical bonding in synthesized films. FESEM micrographs show uniform granular structure of synthesized WN/a-Si3N4 thin films. Surface morphology of synthesized thin films shows that increase in focus shots strongly affects the grain size due to change in ion energy flux. Nano-indentation results show significant increase in hardness with increase in focus shots with maximum hardness of 23.5 ± 1 GPa is observed for 45 focus shots.
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References
G. Giannini, V. Gribkov, F. Longo, M.R. Aruca, C. Tuniz, Phys. Scr. 86, 055801-1 (2012)
R. Rawat, T. Zhang, G. Lim, W. Tan, S. Ng, A. Patran, S. Hassan, S. Springham, T. Tan, M. Zakaullah, J. Fusion Energ. 23, 49 (2004)
J. Pouzo, H. Acuña, M. Milanese, R. Moroso, Eur. Phys. J. D 21, 97 (2002)
M. Sadiq, M. Shafiq, A. Waheed, R. Ahmad, M. Zakaullah, Phys. Lett. A 352, 150 (2006)
M. Hassan, R. Ahmad, A. Qayyum, G. Murtaza, A. Waheed, M. Zakaullah, Vacuum 81, 291 (2006)
R. Rawat, G. Macharaga, P. Lee, S. Xu, S. Lee, AIP Conf. Proc. 669, 365 (2003)
T. Hussain, R. Ahmad, N. Khalid, Z.A. Umar, A. Hussnain, Chin. Phys. B 22, 055204-1 (2013)
I.A. Khan, M. Hassan, R. Ahmad, G. Murtaza, M. Zakaullah, R. Rawat, P. Lee, Int. J. Mod. Phys. B 22, 3941 (2008)
R.S. Rawat, W.M. Chew, P. Lee, T. White, S. Lee, Surf. Coat. Technol. 173, 276 (2003)
S.R. Mohanty, N.K. Neog, B.B. Nayak, B.S. Acharya, P. Lee, T.L. Tan, R.S. Rawat, Nucl. Instrum. Methods Phys. Res. B 243, 113 (2006)
M. Hassan, A. Qayyum, R. Ahmad, R.S. Rawat, P. Lee, S.M. Hassan, G. Murtaza, M. Zakaullah, Nucl. Instrum. Methods Phys. Res. B 267, 1911 (2009)
R.S. Rawat, P. Lee, T. White, L. Ying, S. Lee, Surf. Coat. Technol. 138, 159 (2001)
Y.W. Chung, W.D. Sproul, MRS Bull. 28, 164 (2003)
C.P. Constable, J. Yarwood, W.D. Münz, Surf. Coat. Technol. 116–119, 155 (1999)
J.F. Marco, J.R. Gancedo, M.A. Auger, O. Sánchez, J.M. Albella, Surf. Interface Anal. 37, 1082 (2005)
S. Veprek, M.J.G. Veprek-Heijman, Surf. Coat. Technol. 202, 5063 (2008)
C.W. Lee, Y.T. Kim, Solid-State Electron. 38, 679 (1995)
P.L. Shah, Electron devices. IEEE Trans. 26, 631 (1979)
Q.T. Vu, P.J. Pokela, C.L. Garden, E. Kolawa, S. Raud, M.A. Nicolet, J. Appl. Phys. 68, 6420 (1990)
Z.A. Umar, R. Ahmad, I.A. Khan, T. Hussain, A. Hussnain, N. Khalid, A. Awais, T. Ali, Radiat. Eff. Defects Solids 168, 892 (2013)
I. Khan, S. Jabbar, T. Hussain, M. Hassan, R. Ahmad, M. Zakaullah, R. Rawat, Nucl. Instrum. Methods Phys. Res. B 268, 2228 (2010)
S. Lee, T.Y. Tou, S.P. Moo, M.A. Eissa, A.V. Gholap, K.H. Kwek, S. Mulyodrono, A.J. Smith, S. Suryadi, W. Usada, M. Zakaullah, Am. J. Phys. 56, 62 (1988)
H. Bhuyan, S.R. Mohanty, T.K. Borthakur, R.S. Rawat, Indian J. Pure Appl. Phys. 39, 698 (2001)
P. Choi, C. Deeney, H. Herold, C.S. Wong, Laser Part. Beam 8, 469 (1990)
M. Sadowski, H. Schmidt, H. Herold, Phys. Lett. A 83, 435 (1981)
B.D. Cullity, S.R. Stock, Elements of X-ray diffraction (Prentice Hall, New Jersey, 2001)
T. Nakajima, K. Watanabe, N. Watanabe, J. Electrochem. Soc. 134, 3175 (1987)
L.R. Shaginyan, M. Mišina, J. Zemek, J. Musil, F. Regent, V.F. Britun, Thin Solid Films 408, 136 (2002)
G.M. Ingo, N. Zacchetti, High Temp. Sci., 28, 137 (1988–1989)
T. Fu, Z.F. Zhou, K.Y. Li, Y.G. Shen, Mater. Lett. 59, 618 (2005)
I. Kojima, M. Kurahashi, J. Electron Spectrosc. Relat. Phenom. 42, 177 (1987)
J. Moulder, W. Stickle, P. Sobol, K. Bomben, Handbook of X-ray photoelectron spectroscopy, Physical Electronics Division, Perkin-Elmer Corporation (1992)
C. Louro, A. Cavaleiro, F. Montemor, Surf. Coat. Technol. 142–144, 964 (2001)
J.A. Taylor, Appl. Surf. Sci. 7, 168 (1981)
M. Klasson, A. Berndtsson, J. Hedman, R. Nilsson, R. Nyholm, C. Nordling, J. Electron Spectrosc. Relat. Phenom. 3, 427 (1974)
I.A. Khan, M. Hassan, R. Ahmad, A. Qayyum, G. Murtaza, M. Zakaullah, R. Rawat, Thin Solid Films 516, 8255 (2008)
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One of the authors (Ali Hussnain) would like to thank Higher Education Commission, Pakistan, for providing financial support to conduct this research at Natural Sciences and Science Education, National Institute of Education, Nanyang Technological University (NTU) Singapore.
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Hussnain, A., Rawat, R.S., Seng, T.K. et al. Study of Structural and Mechanical Properties of WN/a-Si3N4 Hard Coatings Grown by Plasma Focus. J Fusion Energ 34, 435–442 (2015). https://doi.org/10.1007/s10894-014-9813-3
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DOI: https://doi.org/10.1007/s10894-014-9813-3