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Bulk acoustic wave (BAW) resonator-based MEMS magnetic field sensor

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Abstract

This paper experimentally demonstrates a MEMS magnetic field sensor which is working at ∼ 0.873 GHz resonant frequency. The Bulk Acoustic Wave (BAW) resonators are most suitable for high-frequency (GHz) operation and, therefore, appropriate for high-sensitivity magnetic field sensors. The sensor has a multilayer stack of (Si/SiO2/Pt/ZnO/Fe65Co35) thin films with Fe65Co35 as a magnetic field-sensing layer and Zinc Oxide (ZnO) as piezoelectric actuation layer. The influence of an external applied magnetic field up to 1847 Oe has been investigated in terms resonance frequency shift due to ΔE effect. The magnetic sensor shows sensitivity (S) of 48.23 ppm/mT with outstanding performance at high frequency and large magnetic field range (0–1847 Oe). The developed MEMS magnetic field sensors are compact, exceptionally sensitive, and possess potential utility in diverse sectors, including automotive, defense, robotics, medical apparatus, space technology, geophysics, and industrial gauging.

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References

  1. M. Li et al., Ultra-sensitive NEMS magnetoelectric sensor for picotesla DC magnetic field detection. Appl. Phys. Lett. 110, 14 (2017)

    Google Scholar 

  2. A. Husmann et al., Megagauss Sens. Nat. 417, 421–424 (2002)

    CAS  Google Scholar 

  3. G. Ciuti et al., MEMS sensor technologies for human centred applications in healthcare, physical activities, safety and environmental sensing: a review on research activities in Italy. Sensors 15(3), 6441–6468 (2015)

    Article  PubMed  PubMed Central  Google Scholar 

  4. G. Wingqvist, V. Yantchev, I. Katardjiev, Mass sensitivity of multilayer thin film resonant BAW sensors. Sens. Actuators A Phys. 148(1), 88–95 (2008)

    Article  CAS  Google Scholar 

  5. T. Kumari, M.M. Prasanna, A. Raja, S. Kumar, Srinath, S.V. Kamat, Effect of thickness on structure, microstructure, residual stress and soft magnetic properties of DC sputtered Fe65Co35 soft magnetic thin films. J. Magn. Magn. Mater. 365, 93–99 (2014)

    Article  Google Scholar 

  6. M.J. Dapino, R.C. Smith, B. Alison, Flatau. Model for the delta-E effect in magnetostrictive transducers. Smart Structures and Materials 2000: Smart Structures and Integrated Systems, vol. 3985, 174–185. SPIE, 2000

  7. Y.U.N. **ao-fan et al., Dual-mode temperature and magnetic sensor based on FBAR. 2020 15th Symposium on Piezoelectrcity, Acoustic Waves and Device Applications (SPAWDA). IEEE, 2021

  8. X. Yun et al., Biaxial film bulk acoustic resonator magnetic sensor based on the Fe80Ga20 anisotropic ∆E effect. J. Phys. D 55, 135002 (2021)

    Article  Google Scholar 

  9. J. Singh, A. Kumar, J. Arout Chelvane, Stress compensated MEMS magnetic actuator based on magnetostrictive Fe65Co35 thin films. Sens. Actuators A Phys. 294, 54–60 (2019)

    Article  CAS  Google Scholar 

  10. B. Spetzler et al., Frequency dependency of the delta-e effect and the sensitivity of delta-e effect magnetic field sensors. Sensors. 19, 4769 (2019)

    Article  CAS  PubMed  PubMed Central  Google Scholar 

  11. Vinita, J. Arout Chelvane, J. Singh, Investigation of magnetostrictive film bulk acoustic resonators (MFBAR) for magnetic field sensing applications. Sens. Actuators A Phys. 362, 114636 (2023)

    Article  CAS  Google Scholar 

  12. C. Collado, J. Mateu, D. Garcia-Pastor, R. Perea-Robles, A. Hueltes, S. Kreuzer, R. Aigner, Nonlinear effects of SiO2 layers in bulk acoustic wave resonators. IEEE Trans. Microwave Theory Tech. 66(4), 1773–1779 (2017)

    Article  Google Scholar 

  13. C.-L. Jia et al., Formation of c-axis oriented ZnO optical waveguides by radio-frequency magnetron sputtering. Opt. Express. 13(13), 5093–5099 (2005)

    Article  CAS  PubMed  Google Scholar 

  14. K. Hoffmann, Z. Skvor, A novel vector network analyzer. IEEE Trans. Microwave Theory Tech. 46(12), 2520–2523 (1998)

    Article  Google Scholar 

  15. Z. Wang et al., Highly sensitive flexible magnetic sensor based on anisotropic magnetoresistance effect. Adv. Mater. 28(42), 9370–9377 (2016)

    Article  CAS  PubMed  Google Scholar 

  16. J. Chen, J. Li, L. Xu, Highly integrated MEMS magnetic sensor based on GMI effect of amorphous wire. Micromachines 10(4), 237 (2019)

    Article  CAS  PubMed  PubMed Central  Google Scholar 

  17. Z. Zhang et al., Enhancing delta E effect at high temperatures of Galfenol/Ti/single-crystal diamond resonators for magnetic sensing. ACS Appl. Mater. Interfaces. 12(20), 23155–23164 (2020)

    Article  CAS  PubMed  Google Scholar 

  18. M. Elhosni et al., Theoretical and experimental study of layered SAW magnetic sensor. 2014 IEEE International Ultrasonics Symposium. IEEE, 2014

Download references

Funding

The authors are thankful to the Director CSIR-CEERI Pilani for continuous support and encouragement. This research work was financially supported by the DRDO Grant No. DGTM/ARDB/GIA/22–23/092, DST-Science, and Engineering Research Board (SERB), Grant No. CRG/2021/000833, and UGC SRF fellowship (award no. 3737/(NET-JULY.2018)).

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Authors and Affiliations

  1. Semiconductor Sensors and Microsystems Group, CSIR-Central Electronics Engineering Research Institute (CSIR- CEERI), Pilani, 333031, India

    Vinita & Jitendra Singh

  2. Academy for Scientific and Innovative Research (AcSIR), Ghaziabad, 201002, India

    Vinita & Jitendra Singh

Authors
  1. Vinita
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  2. Jitendra Singh
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Contributions

Vinita: Writing—original draft, Writing—Review and Editing, Investigation, Data Curation, Methodology, Software, Visualizations, Formal analysis. Jitendra Singh: Conceptualization, Supervision, writing—Review and Editing, Project administration, Funding acquisition, Validation, Data Curation.

Corresponding authors

Correspondence to Vinita or Jitendra Singh.

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Vinita, Singh, J. Bulk acoustic wave (BAW) resonator-based MEMS magnetic field sensor. J Mater Sci: Mater Electron 35, 720 (2024). https://doi.org/10.1007/s10854-024-12472-0

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