Abstract
Automated high resolution electron backscatter diffraction was used to map the local crystallographic texture of Pt and PbZr1−x Ti x O3 (PZT) thin films with a resolution as high as 5 nm. The Pt and PZT films consisted of 99.9% and 94.3% {111} textured grains (i.e., with (111) planes parallel to the substrate surface), respectively. The average Pt and PZT grain sizes were 46 ± 30 nm and 65 ± 30 nm, respectively. Quantification of misorientation distributions and the fraction of non-{111}-textured grains demonstrates the potential of this local texture measurement method for quantifying the ferroelectric variability limits of PZT-based capacitors.
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Notes
Certain commercial products are identified in the text to more accurately describe the experimental procedure. Such identification does not imply endorsement by NIST.
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Acknowledgements
The authors would like to thank Prof. Eric Lifshin of the Nanosciences and Nanoengineering Department at the University at Albany—SUNY for providing access to the electron microscopy facilities and Scott Sitzman, HKL Technology, Inc., for helpful discussion on the use of the EBSD analysis software.
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Fox, G.R., Han, X., Maitland, T.M. et al. Nanometer scale crystallographic texture map** of platinum and lead zirconate titanate thin films by electron backscatter diffraction. J Mater Sci 45, 2991–2994 (2010). https://doi.org/10.1007/s10853-010-4299-5
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DOI: https://doi.org/10.1007/s10853-010-4299-5