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Micromachined SU-8-Based Terahertz 8×8 Slotted Waveguide Antenna Array

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Abstract

This article presents the design and fabrication of a micromachined 300 GHz planar array slotted waveguide antenna utilising the silver-coated SU-8 photoresist layer technology. The array is configured to be built from five SU-8 layers of equal thicknesses. The top layer is devoted to form the 8×8 slots. The following three layers are to form the feed and radiating waveguides. The bottom layer is to enclose the design and allocate the input port. An H-plane waveguide bend based on the matching steps is designed and integrated with the proposed array. This is to maintain a precise alignment with the standard waveguide flange WR-03 and facilitate the measurement. Also, two brass plates are used to clamp the five layers together and tight them via screws in order to minimise the losses. The simulated antenna realised gain is 24.59 dBi, and the 3-dB gain bandwidth is 4.5 GHz. The radiation patterns are very directive, having low side lobe levels. The reflection coefficient has been measured and presented. The proposed micromachined antenna array is directional and low-profile and may find applications in indoor wireless applications and sensors.

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Acknowledgement

The authors would like to thank the EDT research group at the University of Birmingham, UK, and the Rutherford Appleton Laboratory, Dicot, UK, for fabricating and measuring the device.

Funding

This work was supported partially by the UK Engineering and Physical Science Research Council under Contract EP/H029656/1.

Author information

Authors and Affiliations

  1. School of Electronics, Electrical and Systems Engineering, University of Birmingham, B152TT, Birmingham, UK

    Rashad H. Mahmud

  2. Physics Department, Salahaddin University-Erbil, Erbil, 44002, Iraq

    Rashad H. Mahmud, Yi Wang, Talal Skaik & Michael J. Lancaster

  3. Mechatronic Engineering, Faculty of Engineering, Tishk International University, Erbil, 44001, Iraq

    Idris H. Salih

  4. Department of Communication Engineering, Sulaimani Polytechnic University, Sulaimani, 46001, Iraq

    Halgurd N. Awl

  5. National Physical Laboratory (NPL), London, UK

    **aobang Shang

Authors
  1. Rashad H. Mahmud
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  2. Idris H. Salih
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  4. **aobang Shang
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  5. Yi Wang
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  7. Michael J. Lancaster
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Contributions

Conceptualisation: Rashad H. Mahmud, Michael J. Lancaster, and **aobang Shang. Methodology: Rashad H. Mahmud, Michael J. Lancaster, and **aobang Shang. Formal analysis and investigation: Yi Wang, Halgurd N. Awl, Idris H. Salih, and Talal Skaik. Writing-original draft preparation: Rashad H. Mahmud. Writing-review and editing: Michael J. Lancaster, Yi Wang, Talal Skaik, and Idris H. Salih. Supervision: Michael J. Lancaster.

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Correspondence to Rashad H. Mahmud.

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Mahmud, R.H., Salih, I.H., Awl, H.N. et al. Micromachined SU-8-Based Terahertz 8×8 Slotted Waveguide Antenna Array. J Infrared Milli Terahz Waves 42, 1116–1130 (2021). https://doi.org/10.1007/s10762-021-00830-6

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