Abstract
YBa2Cu3O7 films were prepared by the new deposition technique ”complex beam epitaxy”. In this technique, metal-EDTA complexes are evaporated by excimer laser ablation. The metal-EDTA complexes are decomposed by heating on the single crystalline (100)SrTiO3 substrate and form the crystal of metal oxides. The epitaxial relationship between the film and the substrate was determined as [100]YBCO//[100]SrTiO3 and [001]YBCO//[001]SrTiO3. There were no peaks for carbon and nitrogen on the AES and EPMA spectra obtained from surface and inside of the resulting samples. On the surface of the samples, sub-micron crystallites of YBa2Cu3O7 were mainly seen. There was an optimum distance between the target and the substrate for good transcription of the target composition to the substrate.
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Received: 29 January 1998 / Accepted: 10 March 1998
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Tanaka, N., Wakabayashi, H., Takata, Y. et al. Complex beam epitaxy of metal oxide films. Mat Res Innovat 2, 39–44 (1998). https://doi.org/10.1007/s100190050059
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DOI: https://doi.org/10.1007/s100190050059