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LIGA micro-openings for coherence characterization of X-rays

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Abstract

Infinitely thin opaque screens serving for diaphragms as defined in the visible-light optics are not feasible for operation with X-ray beams due to their high penetrability. Micro-openings of predicted sidewall shape in a gold layer up to 140 μm thick which would provide low transparency, are proposed. The proposed micro-openings were made using the LIGA technique and tested successfully at photon energies of up to 25 keV. The micro-openings can be used as targets for coherence X-ray pattern or, if long interference tails are avoided by means of the advanced sidewall shape, as X-ray beam collimators.

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Acknowledgments

This work was carried out with the support of Karlsruhe Nano and Micro Facility (KNMF, http://www.kit.edu/knmf), a Helmholtz Research Infrastructure at Karlsruhe Institute of Technology (KIT, http://www.kit.edu).

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Authors and Affiliations

  1. Institute of Microstructure Technology/Karlsruhe Institute of Technology (KIT), Hermann-von-Helmholtz-Platz 1, 76344, Eggenstein-Leopoldshafen, Germany

    V. Nazmov, M. Kluge, A. Last, F. Marschall, J. Mohr & H. Vogt

  2. Institute for Photon Science and Synchrotron Radiation/Karlsruhe Institute of Technology (KIT), Hermann-von-Helmholtz-Platz 1, 76344, Eggenstein-Leopoldshafen, Germany

    R. Simon

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  1. V. Nazmov
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  2. M. Kluge
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  3. A. Last
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  4. F. Marschall
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  5. J. Mohr
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  6. H. Vogt
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  7. R. Simon
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Correspondence to V. Nazmov.

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Nazmov, V., Kluge, M., Last, A. et al. LIGA micro-openings for coherence characterization of X-rays. Microsyst Technol 20, 2031–2036 (2014). https://doi.org/10.1007/s00542-013-2056-9

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  • DOI: https://doi.org/10.1007/s00542-013-2056-9

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