Abstract.
Oriented crystalline Pb(ZrxTi1-x)O3 (x=0.53) (PZT) thin films were deposited on metallized glass substrates by pulsed laser deposition (1060-nm wavelength Nd:YAG laser light, 10-ns pulse duration, 10-Hz repetition rate, 0.35-J/pulse and 25-J/cm2 laser fluence), from a commercial target at substrate temperatures in the range 380–400 °C. Thin films of 1–3 μm were grown on Au(111)/ Pt/NiCr/glass substrates with a rate of about 1 Å/pulse on an area of 1 cm2. The deposited PZT films with perovskite structure were oriented along the (111) direction, as was revealed from X-ray diffraction spectra. Fourier transform infrared spectroscopy (FTIR) was performed on different PZT films so that their vibrational modes could be determined. Piezoelectric d33 coefficients up to 30 pC/N were obtained on as-deposited films. Ferroelectric hysteresis loops at 100 Hz revealed a remanent polarization of 20 μC/cm2 and a coercive field of 100 kV/cm.
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Received: 21 July 1999 / Accepted: 5 October 1999 / Published online: 28 December 1999
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Verardi, P., Dinescu, M., Craciun, F. et al. Growth of oriented Pb(ZrxTi1-x)O3 thin films on glass substrates by pulsed laser deposition . Appl Phys A 69 (Suppl 1), S837–S839 (1999). https://doi.org/10.1007/s003390051542
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DOI: https://doi.org/10.1007/s003390051542