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Influence of the substrate temperature on BCN films deposited by sequential pulsed laser deposition

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Abstract.

The influence of substrate temperature on the composition and crystallinity of boron carbonitride (BCN) thin films deposited on (100) Si substrates by sequential pulsed laser deposition (PLD) has been investigated. A correlation between the target composition, the nitrogen pressure involved in the process, and the amount of B, C, and N elements (at  % ) in the deposited films is established from energy dispersive spectroscopy (EDS) analysis. Electron microscopy studies show that the films deposited on heated substrates are mainly amorphous. Fourier-transform infrared spectroscopy (FTIR) analysis confirms the BCN-compound formation: the peak of C–BN and the peaks from B–N–B bending vibrations and C–N σ-bond vibrations are present in the spectra. SEM studies show that the deposited films have a smooth surface, with no cracks and few droplets. Results were compared with those obtained on films deposited at room temperature under similar experimental conditions.

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Authors and Affiliations

  1. National Institute for Materials Research, Bucharest, Romania, , , , , , RO

    V.S. Teodorescu & V. Sandu

  2. Ist. Naz Fisica della Materia and Physics Department, University of Lecce, Italy, , , , , , IT

    A. Luches, A. Zocco & M. Martino

  3. Institute for Atomic Physics (IFA), NILPRP, P.O. Box MG-16, RO-76900 Bucharest, Romania, , , , , , RO

    R. Dinu & M. Dinescu

  4. Nat. Inst. For Simulators and Simulating Tech., Bucharest, Romania, , , , , , RO

    M.F. Ciobanu

Authors
  1. V.S. Teodorescu
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  2. A. Luches
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  3. R. Dinu
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  4. A. Zocco
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  5. M.F. Ciobanu
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  6. M. Martino
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  7. V. Sandu
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  8. M. Dinescu
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Additional information

Received: 21 July 1999 / Accepted: 5 October 1999 / Published online: 28 December 1999

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Teodorescu, V., Luches, A., Dinu, R. et al. Influence of the substrate temperature on BCN films deposited by sequential pulsed laser deposition . Appl Phys A 69 (Suppl 1), S667–S670 (1999). https://doi.org/10.1007/s003390051501

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  • DOI: https://doi.org/10.1007/s003390051501

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