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Real-time volumetric growth rate measurements and feedback control of three-dimensional laser chemical vapor deposition

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Authors and Affiliations

  1. Institute for Micromanufacturing, Louisiana Tech University, Ruston, La 71270, USA (Fax: +1-318/257-5262, E-mail: maxwell@eng.latech.edu), , , , , , US

    J.L. Maxwell

  2. Department of Mechanical Engineering, Concordia University, Montréal, Québec H3G 1M8, Canada (Fax: +1-514/848-3175, E-mail: pegna@me.concordia.ca), , , , , , CA

    J. Pegna

  3. Department of Mechanical Engineering, Columbia University, 220 S.W. Mudd, New York, NY 10027-6699 , , , , , , US

    D.V. Messia

Authors
  1. J.L. Maxwell
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  2. J. Pegna
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  3. D.V. Messia
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Received: 4 June 1997/Accepted: 12 June 1997

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Maxwell, J., Pegna, J. & Messia, D. Real-time volumetric growth rate measurements and feedback control of three-dimensional laser chemical vapor deposition . Appl Phys A 67, 323–329 (1998). https://doi.org/10.1007/s003390050778

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  • DOI: https://doi.org/10.1007/s003390050778

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