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X-ray analysis of Ag nanoparticles on Si wafer and influence of Ag nanoparticles on Si nanowire-based gas sensor

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Abstract

Here, the room temperature deposition of silver (Ag) nanoparticles (NPs) on silicon (Si) substrate has been carried out by a simple chemical route to investigate their elastic and micro-structural properties. The theoretical X-ray peak profile analysis has been pursued through the Scherrer model, modified Scherrer model, modified Williamson–Hall model, size–strain plot model and Halder–Wagner model. The X-ray diffraction (XRD) analysis results in the crystalline nature of Ag NPs having nearer dodecahedron structure. The parameters including micro-strain, internal stress and energy density have been estimated for all reflection peaks of XRD. The findings show that the nano-crystalline size (NCS) estimated from all models is in reasonably good agreement. This analysis can pave the way for novel research avenues by comparing the estimated elastic and micro-structural properties of Ag NPs as a potential alternative tool to existing characterization techniques and helpful in fabricating different sizes of Ag–Si nanostructure-based gas-sensing devices. The influence of Ag nanoparticles on Si nanowire towards acetone gas sensor has been studied and achieved remarkable sensitivity 98.77% at 5 MHz frequency with operating temperature at 50 °C.

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Acknowledgements

One of the authors (Vikas Kashyap) acknowledges financial support as SRF (Senior Research Fellowship) from University Grant Commission (UGC) India. The Authors would like to acknowledge Dr. Deepak Kumar Vashista from CSIO Chandigarh for their valuable suggestions and Dr. Deepshikha Rathore, Amity University Rajasthan, Jaipur, for utilizing gas-sensing unit.

Funding

This research was supported by UGC-CSIR (Grant 511636).

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Authors and Affiliations

  1. Department of Physics, Panjab University, Chandigarh, 160014, India

    Vikas Kashyap, Isha Sihmar, Neeru Chaudhary & Navdeep Goyal

  2. Department of Physics, JECRC University, Jaipur, Rajasthan, 303905, India

    Hariom Pawar

  3. Departamento de Física, Facultad de Ciencias, Universidad Católica del Norte, Avenida Angamos 0610, Casilla 1280, Antofagasta, Chile

    Chandra Kumar

  4. Department of Applied Sciences, Invertis University, Bareilly, Uttar Pradesh, 243001, India

    Anand Kumar

  5. Department of Physics, Hans Raj Mahila Maha Vidyalaya, Jalandhar, Punjab, 144008, India

    Sushil Kumar

  6. Department of Applied Sciences, Kamla Nehru Institute of Technology, Sultanpur, Uttar Pradesh, 228118, India

    Kapil Saxena

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  1. Vikas Kashyap
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Contributions

Vikas Kashyap: visualization, conceptualization, writing—review and editing, Chandra Kumar: visualization, conceptualization, writing—review and editing, Hari om Pawar: writing—original draft, Anand Kumar: visualization and editing, Isha: visualization and editing, Kanishk Poria: visualization, Neeru Chaudhary: visualization, review and editing, Navdeep Goyal: visualization, review and editing, Hariom Pawar: conceptualization, writing—review and editing.

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Correspondence to Hariom Pawar or Chandra Kumar.

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Kashyap, V., Pawar, H., Sihmar, I. et al. X-ray analysis of Ag nanoparticles on Si wafer and influence of Ag nanoparticles on Si nanowire-based gas sensor. Appl. Phys. A 130, 238 (2024). https://doi.org/10.1007/s00339-024-07379-w

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