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Channeling in charged particle analysis

  • Charged Particles Activation
  • Published:
Journal of Radioanalytical Chemistry Aims and scope Submit manuscript

Abstract

When a matrix of interest is a single crystal the channeling phenomenon can be exploited to increase the scope of charged particle analyses. One application provides increased sensitivity and precision in the analysis of surface films; another a means of locating foreign atoms within the crystal lattice.

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Reference

  1. J. W. Mayer, L. Eriksson, J. A. Davies, Ion Implantation in Semiconductors, Academic Press, New York, 1970.

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Authors and Affiliations

  1. Atomic Energy of Canada Limited, Chalk River Nuclear Laboratories, Chalk River, Ontario, (Canada)

    W. D. Mackintosh

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  1. W. D. Mackintosh
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Mackintosh, W.D. Channeling in charged particle analysis. J. Radioanal. Chem. 16, 421–425 (1973). https://doi.org/10.1007/BF02514172

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  • DOI: https://doi.org/10.1007/BF02514172

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